5 questions
The thickness of the grown silicon dioxide is ........ that of the consumed silicon.
double
half
triple
quadruple
How many zones are there in the oxidation furnace?
1
2
3
4
Which type of isolation is preferred in modern technologies?
LOCOS
junction isolation
trench isolation
What type of dielectrics do we need for gate oxide and interlayer dielectrics respectively?
GO: low-k
ILD: low-k
GO: low-k
ILD: high-k
GO: high-k
ILD: low-k
GO: high-k
ILD: high-k
Oxides are needed for
Passivation
Gate oxide
Making resistors